Nanostructured DLC coatings for self-assembly applications

1 Abstract— The special characteristics and singular properties of diamond-like carbon (DLC) thin films deposited by pulsed DC plasma enhanced chemical vapor deposition (PECVD), such as hardness and wear resistance, are suitable for self assembly applications as protective coating and as nanostructured surfaces. In this master thesis project, nanostructured DLC surfaces will be designed and characterized for self-assembly applications. Submicron patterns were lithographed on silicon through laser lithography while contact angle, nanotribometer, atomic force microscopy (AFM) and scanning electron miscroscopy (SEM) were used to characterize the surface. DLC properties on lithographed surfaces such as hydrophobicity and hardness were improved with the proper relative quantity of CHF3, resulting in very high contact angles and low friction coefficients. Self assembly properties were tested with silica nanoparticles which were prepared with a sol-gel solution.